WET CHEMICAL ETCHING OF HIGH-TEMPERATURE SUPERCONDUCTING Y-BA-CU-O FILMS IN ETHYLENEDIAMINETETRAACETIC ACID

被引：49

作者：

SHOKOOHI, FK

SCHIAVONE, LM

ROGERS, CT

INAM, A

WU, XD

NAZAR, L

VENKATESAN, T

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 25期

关键词：

D O I：

10.1063/1.102366

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2661 / 2663

页数：3

共 13 条

[1] PREPARATION, PATTERNING, AND PROPERTIES OF THIN YBA2CU3O7-DELTA FILMS
DEVRIES, JWC
DAM, B
HEIJMAN, MGJ
STOLLMAN, GM
GIJS, MAM
HAGEN, CW
GRIESSEN, RP
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (22) : 1904 - 1906
[2] SUPERCONDUCTIVITY IN 2-MU-M WIDE STRIP LINE OF GD-BA-CU-O THIN-FILM FABRICATED BY LOW-TEMPERATURE PROCESSES
ENOKIHARA, A
HIGASHINO, H
SETSUNE, K
MITSUYU, T
WASA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08): : L1521 - L1523
[3] AS-DEPOSITED HIGH-TC AND JC SUPERCONDUCTING THIN-FILMS MADE AT LOW-TEMPERATURES
INAM, A
HEGDE, MS
WU, XD
VENKATESAN, T
ENGLAND, P
MICELI, PF
CHASE, EW
CHANG, CC
TARASCON, JM
WACHTMAN, JB
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (10) : 908 - 909
[4] PULSED LASER ETCHING OF HIGH-TC SUPERCONDUCTING FILMS
INAM, A
WU, XD
VENKATESAN, T
OGALE, SB
CHANG, CC
DIJKKAMP, D
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (14) : 1112 - 1114
[5] FOCUSED ION-BEAM PROCESSES FOR HIGH-TC SUPERCONDUCTORS
MATSUI, S
OCHIAI, Y
KOJIMA, Y
TSUGE, H
TAKADO, N
ASAKAWA, K
MATSUTERA, H
FUJITA, J
YOSHITAKE, T
KUBO, Y
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03): : 900 - 905
[6] REACTIVE ION-BEAM ETCHING OF Y-BA-CU-O SUPERCONDUCTORS
MATSUI, S
TAKADO, N
TSUGE, H
ASAKAWA, K
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (01) : 69 - 71
[7] CHEMICAL ETCHING OF Y-CU-BA-O THIN-FILMS
SHIH, I
QIU, CX
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (18) : 1523 - 1524
[8] CHEMICAL ETCHING OF HIGH-TC SUPERCONDUCTING FILMS IN FELIOX-115 SOLUTION
TONOUCHI, M
SAKAGUCHI, Y
KOBAYASHI, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (01): : L98 - L100
[9] SUPERCONDUCTING LINES FABRICATED FROM EPITAXIAL Y-BA-CU-O FILMS
TSUGE, H
MATSUI, S
MATSUKURA, N
KOJIMA, Y
WADA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (11): : L2237 - L2239
[10] NONAQUEOUS CHEMICAL ETCH FOR YBA2CU3O7-X
VASQUEZ, RP
HUNT, BD
FOOTE, MC
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (26) : 2692 - 2694

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