MISSING DIMERS AND STRAIN RELIEF IN GE FILMS ON SI(100)

被引:87
作者
TERSOFF, J
机构
[1] IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights
来源
PHYSICAL REVIEW B | 1992年 / 45卷 / 15期
关键词
D O I
10.1103/PhysRevB.45.8833
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The 2 x 8 reconstruction of Ge films on Si(100) is shown to arise from ordered arrays of rebonded missing dimers (RMD's). Such a reconstruction was suggested by Pandey for Si(100). However, because of their large tensile stress, RMD's are much more energetically favorable in epitaxially compressed Ge films. For Si(100), RMD's have very small energy, and their presence may account for the puzzling discrepancy between theory and experiment for the stress anisotropy.
引用
收藏
页码:8833 / 8836
页数:4
相关论文
共 15 条
[1]   SPONTANEOUS FORMATION OF STRESS DOMAINS ON CRYSTAL-SURFACES [J].
ALERHAND, OL ;
VANDERBILT, D ;
MEADE, RD ;
JOANNOPOULOS, JD .
PHYSICAL REVIEW LETTERS, 1988, 61 (17) :1973-1976
[2]   1ST-ORDER TRANSITIONS BETWEEN SURFACE PHASES WITH DIFFERENT STEP STRUCTURES - REPLY [J].
ALERHAND, OL ;
BERKER, AN ;
JOANNOPOULOS, JD ;
VANDERBILT, D ;
HAMERS, RJ ;
DEMUTH, JE .
PHYSICAL REVIEW LETTERS, 1991, 66 (07) :962-962
[3]   DISLOCATION-FREE STRANSKI-KRASTANOW GROWTH OF GE ON SI(100) [J].
EAGLESHAM, DJ ;
CERULLO, M .
PHYSICAL REVIEW LETTERS, 1990, 64 (16) :1943-1946
[4]  
KOHLER U, IN PRESS ULTRAMICROS
[5]  
MEADE RD, 1990, 20TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF SEMICONDUCTORS, VOLS 1-3, P123
[6]  
MO Y, COMMUNICATION
[7]   SCANNING TUNNELING MICROSCOPY STUDIES OF THE GROWTH-PROCESS OF GE ON SI(001) [J].
MO, YW ;
LAGALLY, MG .
JOURNAL OF CRYSTAL GROWTH, 1991, 111 (1-4) :876-881
[8]  
PANDEY KC, 1985, 17TH P INT C PHYS SE, P55
[9]   TOTAL ENERGY AND STRESS OF METAL AND SEMICONDUCTOR SURFACES [J].
PAYNE, MC ;
ROBERTS, N ;
NEEDS, RJ ;
NEEDELS, M ;
JOANNOPOULOS, JD .
SURFACE SCIENCE, 1989, 211 (1-3) :1-20
[10]   NATURE OF THE STEP-HEIGHT TRANSITION ON VICINAL SI(001) SURFACES [J].
PEHLKE, E ;
TERSOFF, J .
PHYSICAL REVIEW LETTERS, 1991, 67 (04) :465-468