STRUCTURAL STABILITY OF SHORT-PERIOD SI/GE SUPERLATTICES STUDIED WITH RAMAN-SPECTROSCOPY

被引:71
作者
SCHORER, R
FRIESS, E
EBERL, K
ABSTREITER, G
机构
[1] Walter Schottky Institut, Technische Universität M̈nchen
关键词
D O I
10.1103/PhysRevB.44.1772
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Annealing effects on strain-symmetrized Si/Ge superlattices with period lengths of 6 to 24 monolayers are studied by Raman spectroscopy in the temperature range of 430-degrees-C to 780-degrees-C. Using a simple microscopic diffusion model, the evolution of the concentration profiles in the growth direction is calculated in order to understand the energy shift of the optical phonons and the intensity decay of the folded acoustic phonons. The analysis of the latter provides values of the interdiffusion coefficient D*. The strong dependence of the tracer-diffusion constants on the Si concentration causes different intermixing behavior of the Si and Ge layers, which results in a dependence of the interdiffusion coefficient on the degree of homogenization. A variation of D* with the average Si content and the superlattice period is obtained and is compared to the standard interdiffusion analysis.
引用
收藏
页码:1772 / 1781
页数:10
相关论文
共 33 条
  • [1] ABSTREITER G, 1989, NATO ADV SCI I B-PHY, V206, P165
  • [2] SILICON GERMANIUM STRAINED LAYER SUPERLATTICES
    ABSTREITER, G
    EBERL, K
    FRIESS, E
    WEGSCHEIDER, W
    ZACHAI, R
    [J]. JOURNAL OF CRYSTAL GROWTH, 1989, 95 (1-4) : 431 - 438
  • [3] RAMAN-SPECTRA OF C-SI1-XGEX ALLOYS
    ALONSO, MI
    WINER, K
    [J]. PHYSICAL REVIEW B, 1989, 39 (14): : 10056 - 10062
  • [4] INTERDIFFUSION AND STRAIN RELAXATION IN (SIMGEN)P SUPERLATTICES
    BARIBEAU, JM
    PASCUAL, R
    SAIMOTO, S
    [J]. APPLIED PHYSICS LETTERS, 1990, 57 (15) : 1502 - 1504
  • [5] ANNEALING EFFECTS IN SHORT-PERIOD SI-GE STRAINED LAYER SUPERLATTICES
    BRUGGER, H
    FRIESS, E
    ABSTREITER, G
    KASPER, E
    KIBBEL, H
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1988, 3 (12) : 1166 - 1170
  • [6] FOLDED ACOUSTIC PHONONS IN SI-SIXGE1-X SUPERLATTICES
    BRUGGER, H
    ABSTREITER, G
    JORKE, H
    HERZOG, HJ
    KASPER, E
    [J]. PHYSICAL REVIEW B, 1986, 33 (08): : 5928 - 5930
  • [7] DIFFUSE X-RAY DETERMINATION OF ENERGY OF MIXING AND ELASTIC-CONSTANTS OF GE-SI SOLID-SOLUTIONS
    BUBLIK, VT
    GORELIK, SS
    ZAITSEV, AA
    POLYAKOV, AY
    [J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1974, 66 (02): : 427 - 432
  • [8] ON SPINODAL DECOMPOSITION
    CAHN, JW
    [J]. ACTA METALLURGICA, 1961, 9 (09): : 795 - 801
  • [9] FREE ENERGY OF A NONUNIFORM SYSTEM .1. INTERFACIAL FREE ENERGY
    CAHN, JW
    HILLIARD, JE
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1958, 28 (02) : 258 - 267
  • [10] RESONANT RAMAN-SCATTERING IN SHORT-PERIOD (SI)N/(GE)M SUPERLATTICES
    CERDEIRA, F
    ALONSO, MI
    NILES, D
    GARRIGA, M
    CARDONA, M
    KASPER, E
    KIBBEL, H
    [J]. PHYSICAL REVIEW B, 1989, 40 (02): : 1361 - 1364