DOPING CONCENTRATION-DEPENDENCE OF RADIANCE AND OPTICAL MODULATION BANDWIDTH IN CARBON-DOPED GA0.51IN0.49P/GAAS LIGHT-EMITTING-DIODES GROWN BY GAS SOURCE MOLECULAR-BEAM EPITAXY

被引:15
作者
DELYON, TJ [1 ]
WOODALL, JM [1 ]
MCINTURFF, DT [1 ]
BATES, RJS [1 ]
KASH, JA [1 ]
KIRCHNER, PD [1 ]
CARDONE, F [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,DIV RES,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.106654
中图分类号
O59 [应用物理学];
学科分类号
摘要
Double-heterostructure light-emitting diodes (LEDs) consisting of an n-Ga0.51In0.49P emitter, a carbon-doped p-GaAs active layer, and a p-Al0.30Ga0.70As cladding layer have been grown by gas source molecular beam epitaxy with halomethane carbon doping sources. CCl4 and CHCl3 have been used to vary the active layer C doping level from 10(18) to 10(20) cm-3. Measurements of LED optical modulation bandwidth indicate that the bandwidth increases with C doping, attaining a record value of 1.6 GHz at 10(20) cm-3 C concentration. The LED radiance is observed to decline significantly in the 10(19) - 10(20) cm-3 range.
引用
收藏
页码:353 / 355
页数:3
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