STRESS IN TRANSPARENT CONDUCTIVE SN-DOPED INDIUM OXIDE THIN-FILMS

被引：10

作者：

JUST, M

MAINTZER, N

BLECH, I

机构：

来源：

THIN SOLID FILMS | 1978年 / 48卷 / 03期

关键词：

D O I：

10.1016/0040-6090(78)90004-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L19 / L20

页数：2

共 8 条

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[5]

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[7] COMPACT INTERFEROMETER FOR ACCURATE DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS [J].

SHAMIR, J .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1976, 9 (06) :499-503

[8] TRANSPARENT CONDUCTIVE SN-DOPED INDIUM OXIDE COATINGS DEPOSITED BY REACTIVE SPUTTERING WITH A POST CATHODE [J].

THORNTON, JA ;

HEDGCOTH, VL .

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