MEASUREMENT OF SIDEWALL ROUGHNESS BY SCANNING TUNNELING MICROSCOPE

被引：8

作者：

SATO, A ^{[1
]}

TSUKAMOTO, Y ^{[1
]}

BABA, M ^{[1
]}

MATSUI, S ^{[1
]}

机构：

[1] NEC CORP LTD,FUNDAMENTAL RES LABS,TSUKUBA,IBARAKI 305,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 11B期

关键词：

SCANNING TUNNELING MICROSCOPE; SIDEWALL ROUGHNESS; 2-DIMENSIONAL SERVO; ELECTRON-BEAM DEPOSITION;

D O I：

10.1143/JJAP.30.3298

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A scanning tunneling microscope (STM) is a highly effective tool for observing a microfabricated pattern. However, it is difficult to measure sidewall roughness using a conventional STM because of the restriction of the tip shape and one-dimensional servo system. The main objective of this study is to develop a sidewall roughness characterization tool. The electron-beam deposition method is applied to preparing a novel STM tip shape. A two-dimensional servo system, with a subnano-vibration mode to provide vibrations below 1 nm for x-and z-directions to a tip during scanning, has been developed for sidewall roughness measurement.

引用

页码：3298 / 3301

页数：4

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