ANOMALIES IN THE LATTICE-PARAMETERS AND RESIDUAL-STRESS OF COATINGS MADE BY PHYSICAL VAPOR-DEPOSITION METHODS

Coatings of TiN, ZrN and HfN were deposited onto stainless steel by reactive sputtering at a basis of -100 V. The lattice parameters and residual stress are very different on the different crystal planes in each of the films. They show anomalously low lattice parameters on the {200} family of planes coupled with ψ splitting from the (400) planes. This condition is not changed by an equilibrium annealing treatment of 1 h at 900 °C. The results are discussed in terms of lattice defects such as ultramicrocracking and distortion occuring during the deposition process, and plastic flow due to differential thermal contraction. The effects cannot be separated and further studies are indicated. © 1990.