EFFECT OF ENERGETIC NEUTRALIZED NOBLE-GAS IONS ON THE STRUCTURE OF ION-BEAM SPUTTERED THIN METAL-FILMS

[1] CHARGE STATE OF LOW-ENERGY REFLECTED PARTICLES [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) : 98 - 106

[2] Bottiger J., 1971, Radiation Effects, V11, P69, DOI 10.1080/00337577108230451

[3] INVESTIGATION OF ION-BEAM-SPUTTERED NB-TI THIN-FILMS BY COMPLEMENTARY USE OF BACKSCATTERING AND NUCLEAR-REACTION MICROANALYSIS [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (12) : 5896 - 5902

[4] Chopra K.L, 1969, THIN FILM PHENOMENA

[5] THEORY OF ION SCATTERING FROM SINGLE-CRYSTALS [J]. SURFACE SCIENCE, 1979, 87 (02) : 683 - 699

[6] BACKSCATTERING OF NEUTRALIZED NOBLE-GAS IONS FROM POLYCRYSTALLINE SURFACES AT BOMBARDING ENERGIES BELOW 1KEV [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F): : 687 - 693

[7] QUANTITATIVE ION-BEAM PROCESS FOR THE DEPOSITION OF COMPOUND THIN-FILMS [J]. APPLIED PHYSICS LETTERS, 1983, 43 (06) : 547 - 549

[8] LOW-ENERGY ION SCATTERING - ELASTIC AND INELASTIC EFFECTS [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F): : 535 - 545

[9] HOFFMAN DW, 1983, 9TH P INT VAC C 5TH, P415

[10] QUANTITATIVE X-RAY-FLUORESCENCE ANALYSIS OF THIN-FILMS USING LAMA-2 [J]. X-RAY SPECTROMETRY, 1981, 10 (01) : 28 - 30

[1] CHARGE STATE OF LOW-ENERGY REFLECTED PARTICLES [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) : 98 - 106

[2] Bottiger J., 1971, Radiation Effects, V11, P69, DOI 10.1080/00337577108230451

[3] INVESTIGATION OF ION-BEAM-SPUTTERED NB-TI THIN-FILMS BY COMPLEMENTARY USE OF BACKSCATTERING AND NUCLEAR-REACTION MICROANALYSIS [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (12) : 5896 - 5902

[4] Chopra K.L, 1969, THIN FILM PHENOMENA

[5] THEORY OF ION SCATTERING FROM SINGLE-CRYSTALS [J]. SURFACE SCIENCE, 1979, 87 (02) : 683 - 699

[6] BACKSCATTERING OF NEUTRALIZED NOBLE-GAS IONS FROM POLYCRYSTALLINE SURFACES AT BOMBARDING ENERGIES BELOW 1KEV [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F): : 687 - 693

[7] QUANTITATIVE ION-BEAM PROCESS FOR THE DEPOSITION OF COMPOUND THIN-FILMS [J]. APPLIED PHYSICS LETTERS, 1983, 43 (06) : 547 - 549

[8] LOW-ENERGY ION SCATTERING - ELASTIC AND INELASTIC EFFECTS [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F): : 535 - 545

[9] HOFFMAN DW, 1983, 9TH P INT VAC C 5TH, P415

[10] QUANTITATIVE X-RAY-FLUORESCENCE ANALYSIS OF THIN-FILMS USING LAMA-2 [J]. X-RAY SPECTROMETRY, 1981, 10 (01) : 28 - 30