THEORETICAL-MODEL FOR RADIATION ENHANCED DIFFUSION AND REDISTRIBUTION OF IMPURITIES - COMPARISON WITH EXPERIMENTS

被引：35

作者：

LOUALICHE, S

LUCAS, C

BARUCH, P

GAILLIARD, JP

PFISTER, JC

机构：

[1] UNIV PARIS 07,CNRS LAB,ECOLE NORM SUPER,PHYS SOLIDES GRP,F-75251 PARIS 05,FRANCE

[2] CEN,LETI,F-38041 GRENOBLE,FRANCE

[3] CEN,DRF,F-38041 GRENOBLE,FRANCE

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 69卷 / 02期

关键词：

D O I：

10.1002/pssa.2210690229

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：663 / 676

页数：14

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