PREFERENTIALLY ORIENTED CRYSTAL-GROWTH IN DYNAMIC MIXING PROCESS - AN APPROACH BY MONTE-CARLO SIMULATION

被引:17
作者
KIUCHI, M
CHAYAHARA, A
HORINO, Y
FUJII, K
SATOU, M
KANG, HJ
BEAG, YW
KIMURA, Y
SHIMIZU, R
机构
[1] CHUNGBUK NATL UNIV,DEPT PHYS,CHUNGHUK 310,SOUTH KOREA
[2] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 10期
关键词
Crystal growth; Dynamic mixing method; Ion beam process; Monte Carlo simulation; Preferred orientation; Titanium nitride;
D O I
10.1143/JJAP.29.2059
中图分类号
O59 [应用物理学];
学科分类号
摘要
Titanium nitride films produced by a dynamic mixing method have a preferential crystallographic orientation, and the orientation varies with the arrival ratio of the depositing elements. For this study, we performed a Monte Carlo simulation of the damaging process caused by nitrogen ion irradiation onto (111) and (100) planes of a TiN single crystal. The simulation predicts that in (100)TiN, N+penetrates through the open channel, losing its kinetic energy mainly by electronic stopping, while N+loses its kinetic energy mainly by nuclear stopping in (111)TiN, leading the crystal to be amorphous. The contribution of this dynamic mixing process to the development of preferred orientation is discussed. © 1990 IOP Publishing Ltd.
引用
收藏
页码:2059 / 2065
页数:7
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