TRANSITION LAYER FORMATION SIMULATION DURING FILM DEPOSITION BY AN ION-MOLECULAR BEAM

被引：9

作者：

PUGACHEVA, TS

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1987年 / 102卷 / 1-4期

关键词：

D O I：

10.1080/00337578708222913

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：143 / 155

页数：13

共 20 条

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