ION-BEAM INDUCED ATOMIC MIXING AT THE SIO2/SI INTERFACE STUDIED BY MEANS OF MONTE-CARLO SIMULATION

被引：11

作者：

FERRIEU, F

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1982年 / 62卷 / 3-4期

关键词：

D O I：

10.1080/00337578208222797

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：231 / 236

页数：6

共 26 条

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