ON THE ROLE OF INDIUM UNDERLAYS IN THE PREVENTION OF THERMAL GROOVING IN THIN GOLD-FILMS

被引：24

作者：

LEE, SY ^{[1
]}

HUMMEL, RE ^{[1
]}

DEHOFF, RT ^{[1
]}

机构：

[1] UNIV FLORIDA,DEPT MAT SCI & ENGN,GAINESVILLE,FL 32611

来源：

THIN SOLID FILMS | 1987年 / 149卷 / 01期

关键词：

D O I：

10.1016/0040-6090(87)90246-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：29 / 48

页数：20

相关论文

共 54 条

[1] ELECTRICAL AND STRUCTURAL-PROPERTIES OF THIN GOLD-FILMS OBTAINED BY VACUUM EVAPORATION AND SPUTTERING
ADAMOV, M
PEROVIC, B
NENADOVIC, T
[J]. THIN SOLID FILMS, 1974, 24 (01) : 89 - 100
[2] COATING, MECHANICAL CONSTRAINTS, AND PRESSURE EFFECTS ON ELECTROMIGRATION
AINSLIE, NG
WELLS, OC
DHEURLE, FM
[J]. APPLIED PHYSICS LETTERS, 1972, 20 (04) : 173 - &
[3] THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY
BRAVMAN, JC
SINCLAIR, R
[J]. JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01): : 53 - 61
[4] BREITLING HM, 1972, J PHYS CHEM SOLIDS, V33, P84
[5] CRACKED-STRIPE RESISTANCE AND CURRENT CROWDING EFFECT
CHAUG, YS
HUANG, HL
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1975, 14 (02) : 267 - 271
[6] CHAUG YS, 1978, J APPL PHYS, V49, P331
[7] CHOPRA KL, 1979, THIN FILM PHENOMENA, P272
[8] CULLITY BD, 1978, ELEMENTS XRAY DIFFRA, P304
[9] CRYSTAL GROWTH AND ORIENTATION IN DEPOSITS CONDENSED FROM THE VAPOUR
EVANS, DM
WILMAN, H
[J]. ACTA CRYSTALLOGRAPHICA, 1952, 5 (06): : 731 - +
[10] CHARACTERIZATION OF EVAPORATED GOLD-INDIUM FILMS ON SEMICONDUCTORS
FINSTAD, TG
ANDREASSEN, T
OLSEN, T
[J]. THIN SOLID FILMS, 1975, 29 (01) : 145 - 154

← 1 2 3 4 5 6 →