EFFECTS OF CONTROLLED AS PRESSURE ANNEALING ON DEEP LEVELS OF LIQUID-ENCAPSULATED CZOCHRALSKI GAAS SINGLE-CRYSTALS

被引：25

作者：

CHICHIBU, S

OHKUBO, N

MATSUMOTO, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 08期

关键词：

D O I：

10.1063/1.341358

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3987 / 3993

页数：7

共 29 条

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