The waveguiding Ba2NaNb5O15 films have been prepared on KTiOPO4 substrates by pulsed laser deposition technique. Characterizations of the as-grown films by the x-ray theta-2theta scan and beta scan and the scanning electron microscopy revealed that epitaxial (110)-oriented Ba2NaNb5O15 films with small surface roughness were achieved on (100)-oriented KTiOPO4 plates. The x-ray photoelectron spectrometer was employed to probe the chemical constitution of the as-grown films. Favorable optical waveguiding properties were demonstrated by m-line measurement and evaluation of propagation loss on the order of 1.0 dB/cm of TM and TE multimodes. (C) 1994 American Institute of Physics.