EFFECT OF DIFFUSION-INDUCED DISLOCATIONS ON ANTIMONY DIFFUSION INTO SILICON

被引：5

作者：

SONG, SH

NIIMI, T

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1981年 / 128卷 / 01期

关键词：

D O I：

10.1149/1.2127356

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：145 / 149

页数：5

共 21 条

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