SEM CHARACTERIZATION OF MULTILAYER STRUCTURES

被引：4

作者：

ARISTOV, VV

DRYOMOVA, NN

KIREEV, VA

RAZGONOV, II

YAKIMOV, EB

机构：

来源：

ACTA PHYSICA POLONICA A | 1993年 / 83卷 / 01期

关键词：

D O I：

10.12693/APhysPolA.83.81

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The possibilities of non-destructive multilayer structure characterization using the backscattering electron and modulated cathodoluminescence modes of the SEM have been discussed. It is shown that these techniques allow one to measure the parameters of thin layers of the thickness of about 10 nm.

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页码：81 / 86

页数：6

相关论文

共 10 条

[1] SCANNING ELECTRON-MICROSCOPY IN SUB-MICRON STRUCTURE DIAGNOSTICS [J].

ARISTOV, VV ;

KAZMIRUK, VV ;

USHAKOV, NG ;

YAKIMOV, EB ;

ZAITSEV, SI .

VACUUM, 1988, 38 (11) :1045-1050

[2] SIGNAL FORMATION OF BACKSCATTERED ELECTRONS BY MICROINHOMOGENEITIES AND SURFACE RELIEF IN A SEM [J].

ARISTOV, VV ;

DREOMOVA, NN ;

FIRSOVA, AA ;

KAZMIRUK, VV ;

SAMSONOVICH, AV ;

USHAKOV, NG ;

ZAITSEV, SI .

SCANNING, 1991, 13 (01) :15-22

[3]

ARISTOV VV, 1990, ELECTRONNAYA PROMYSH, V2, P44

[4] THEORETICAL-STUDY OF THE INFORMATION DEPTH OF THE CATHODOLUMINESCENCE SIGNAL IN SEMICONDUCTOR-MATERIALS [J].

HERGERT, W ;

PASEMANN, L .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 85 (02) :641-648

[5]

HOLT DB, 1989, SEM MICROCHARACTERIZ, P372

[6]

KIREEV VA, 1989, ZH TEKH FIZ+, V59, P180

[7] ELECTRON BACKSCATTERING FROM THIN-FILMS [J].

NIEDRIG, H .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (04) :R15-R49

[8] CATHODOLUMINESCENCE QUANTUM-WELL STUDIES [J].

WARWICK, CA .

JOURNAL DE PHYSIQUE IV, 1991, 1 (C6) :117-123

[9] INVESTIGATION OF MINORITY-CARRIER DIFFUSION LENGTHS BY ELECTRON-BOMBARDMENT OF SCHOTTKY BARRIERS [J].

WU, CJ ;

WITTRY, DB .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (05) :2827-2836

[10]

YAKIMOV E, 1992, SCANNING MICROSCOPY, V6, P81