A NEW ANGULAR SHEARING INTERFEROMETER FOR COLLIMATION IN THE NANORADIAN RANGE

被引：3

作者：

TANAKA, M

NAKAYAMA, K

机构：

[1] Nanometrology Group, Quantum Metrology Section, National Research Laboratory of Metrology, Tsukuba, lbaraki, 305, Umezono

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 02期

关键词：

Angular interferometer for nanoradian collimatio;

D O I：

10.1143/JJAP.29.427

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new compact polarization laser angular interferometer for precision collimation of a mirror in the nanoradian range is described with an analytical treatment and an experimental verification of its performance. The phase of the optical fringe is proportional to the angular deflection of the object mirror. The angular shearing in two interfering laser beams modulates its amplitude so sharply that it enables determination of a particular optical fringe out of a number of periodic fringes. Ray tracing and Gaussian beam treatment can describe the mechanism of the modulation and explain the experimental behavior and predict some important features of the interferometer required for other precision applications. © 1990 The Japan Society of Applied Physics.

引用

页码：427 / 433

页数：7

共 12 条

[1] AN ATOMIC-RESOLUTION ATOMIC-FORCE MICROSCOPE IMPLEMENTED USING AN OPTICAL-LEVER [J].

ALEXANDER, S ;

HELLEMANS, L ;

MARTI, O ;

SCHNEIR, J ;

ELINGS, V ;

HANSMA, PK ;

LONGMIRE, M ;

GURLEY, J .

JOURNAL OF APPLIED PHYSICS, 1989, 65 (01) :164-167

[2] ABSOLUTE MEASUREMENT OF THE (220)-LATTICE PLANE SPACING IN A SILICON CRYSTAL [J].

BECKER, P ;

DORENWENDT, K ;

EBELING, G ;

LAUER, R ;

LUCAS, W ;

PROBST, R ;

RADEMACHER, HJ ;

REIM, G ;

SEYFRIED, P ;

SIEGERT, H .

PHYSICAL REVIEW LETTERS, 1981, 46 (23) :1540-1543

[3]

DESLATTES RD, 1980, P INT SCH PHYS, P38

[4] RECORDING OPTICAL LEVER [J].

JONES, RV ;

RICHARDS, JCS .

JOURNAL OF SCIENTIFIC INSTRUMENTS, 1959, 36 (02) :90-94

[5] LASER BEAMS AND RESONATORS [J].

KOGELNIK, H ;

LI, T .

APPLIED OPTICS, 1966, 5 (10) :1550-+

[6] SINGLE AXIS PHOTOELECTRONIC AUTOCOLLIMATOR [J].

LUTHER, GG ;

DESLATTES, RD ;

TOWLER, WR .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (05) :747-750

[7] DIFFRACTION EFFECTS IN OPTICAL INTERFEROMETERS ILLUMINATED BY LASER SOURCES [J].

MANA, G .

METROLOGIA, 1989, 26 (02) :87-93

[8]

MORIMURA M, 1975, P JPN J APPL PHY S14, V14, P461

[9]

PROBST R, 1980, PTBAPH13 PHYS TECHN, P189

[10] A NEW OPTICAL INTERFEROMETER FOR ABSOLUTE MEASUREMENT OF LINEAR DISPLACEMENT IN THE SUBNANOMETER RANGE [J].

TANAKA, M ;

NAKAYAMA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (04) :L233-L235

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