SYNCHROTRON RADIATION LITHOGRAPHY SYSTEM IN AN ATMOSPHERIC-ENVIRONMENT

被引：2

作者：

OKADA, K

KOUNO, E

NOMURA, E

SUZUKI, K

FUJII, K

TANAKA, Y

IWATA, J

KAWASE, Y

机构：

[1] NEC CORP LTD,PROD ENGN DEV LAB,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN

[2] NEC CORP LTD,DIV RES & DEV PLANNING & TECH SERV,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN

来源：

关键词：

D O I：

10.1063/1.1141050

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1643 / 1648

页数：6

共 17 条

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