SYNCHROTRON RADIATION LITHOGRAPHY SYSTEM IN AN ATMOSPHERIC-ENVIRONMENT

被引:2
作者
OKADA, K
KOUNO, E
NOMURA, E
SUZUKI, K
FUJII, K
TANAKA, Y
IWATA, J
KAWASE, Y
机构
[1] NEC CORP LTD,PROD ENGN DEV LAB,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN
[2] NEC CORP LTD,DIV RES & DEV PLANNING & TECH SERV,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN
关键词
D O I
10.1063/1.1141050
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:1643 / 1648
页数:6
相关论文
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