MODIFIED JONES CALCULUS FOR ANALYSIS OF ERRORS IN POLARIZATION-MODULATION ELLIPSOMETRY

被引：41

作者：

OHANDLEY, RC ^{[1
]}

机构：

[1] MICHELSON LAB,CHINA LAKE,CA 93555

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1973年 / 63卷 / 05期

关键词：

D O I：

10.1364/JOSA.63.000523

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：523 / 528

页数：6

共 21 条

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[5] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].

AZZAM, RMA ;

BASHARA, NM .

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[6] ELLIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING INCOHERENT EFFECTS [J].

AZZAM, RMA ;

BASHARA, NM .

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[7] GENERAL TREATMENT OF EFFECT OF CELL WINDOWS IN ELLIPSOMETRY [J].

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BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (06) :773-&

[8] OPTICAL MEASUREMENTS ON LIQUID METALS USING A NEW ELLIPSOMETER [J].

FABER, TE ;

SMITH, NV .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1968, 58 (01) :102-&

[9] AN IMPROVED METHOD FOR HIGH REFLECTIVITY ELLIPSOMETRY BASED ON A NEW POLARIZATION MODULATION TECHNIQUE [J].

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SCHNATTERLY, SE .

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[10]

JASPERSON SN, TO BE PUBLISHED

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