THERMODYNAMIC ASSESSMENT OF THE SILICON - OXYGEN SYSTEM

被引:39
作者
HALLSTEDT, B
机构
[1] Division of Physical Metallurgy, Royal Institute of Technology
来源
CALPHAD-COMPUTER COUPLING OF PHASE DIAGRAMS AND THERMOCHEMISTRY | 1992年 / 16卷 / 01期
关键词
D O I
10.1016/0364-5916(92)90038-Y
中图分类号
O414.1 [热力学];
学科分类号
摘要
A thermodynamic assessment of the Si-O system has been made using a computerized CALPHAD (calculation of phase diagrams) technique. The liquid phase is described by a two-sublattice model for ionic liquids and the solid solution of oxygen in silicon is described by a regular solution model. A set of parameters describing the Gibbs energies of the different phases is given and calculated phase diagrams are presented.
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页码:53 / 61
页数:9
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