NITROGEN RADICAL DOPING DURING METALORGANIC VAPOR-PHASE EPITAXY OF ZNSE

被引:9
作者
MORIMOTO, K
FUJINO, T
机构
[1] Research Institute for Advanced Science and Technology, University of Osaka Prefecture, Sakai, Osaka 593
关键词
D O I
10.1063/1.110482
中图分类号
O59 [应用物理学];
学科分类号
摘要
The availability of nitrogen radical doping in low-pressure metalorganic vapor phase epitaxy of N-doped ZnSe layers is reported. Active nitrogen generated by low-frequency dielectric discharge was supplied alternately with source materials. The narrow and distinct peak for the acceptor-bound exciton, together with donor-acceptor pair peaks, is predominant in the low-temperature cathodoluminescence spectra for the layers prepared with alternate growth and doping.
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页码:2384 / 2386
页数:3
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