PREPARATION AND CHARACTERIZATION OF GERMANIUM OXIDE THIN-FILMS

被引：16

作者：

CAPERAA, C ^{[1
]}

BAUD, G ^{[1
]}

BESSE, JP ^{[1
]}

BONDOT, P ^{[1
]}

FESSLER, P ^{[1
]}

JACQUET, M ^{[1
]}

机构：

[1] UNIV CLERMONT FERRAND,PHYS MILIEUX CONDENSES LAB,CNRS,URA 796,F-63177 CLERMONT FERRAND,FRANCE

来源：

MATERIALS RESEARCH BULLETIN | 1989年 / 24卷 / 11期

关键词：

10;

D O I：

10.1016/0025-5408(89)90141-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1361 / 1367

页数：7

共 10 条

[1]

AWITOR K, 1ST P INT C PLASM SU

[2] INFRARED SPECTROSCOPIC STUDY OF GEOX FILMS [J].

JISHIASHVILI, DA ;

KUTELIA, ER .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1987, 143 (02) :K147-K150

[3]

MAGRUDER RH, 1987, J NONCRYST SOLIDS, V94, P57

[4] STUDIES IN GERMANIUM OXIDE SYSTEMS .1. PHASE EQUILIBRIA IN THE SYSTEM LI2O-GEO2 [J].

MURTHY, MK ;

IP, J .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1964, 47 (07) :328-331

[5] OPTICAL-PROPERTIES OF THIN GEOX FILMS [J].

SHABALOV, AL ;

FELDMAN, MS .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 83 (01) :K11-K14

[6] X-RAY PHOTOELECTRON-SPECTROSCOPY OF O 1S AND SI 2P LINES IN FILMS OF SIOX FORMED BY ELECTRON-BEAM EVAPORATION [J].

SUN, YN ;

FELDMAN, A ;

FARABAUGH, EN .

THIN SOLID FILMS, 1988, 157 (02) :351-360

[7]

SUZUKI K, 1985, J PHYSIQUE, V12, P617

[8] XPS STUDY ON A-GEOX (1.3 LESS-THAN X LESS-THAN 2) FILMS PREPARED FROM GEO2 [J].

TAKANO, Y ;

TANDOH, Y ;

OZAKI, H ;

MORI, N .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1985, 130 (02) :431-436

[9]

UMEZAWA T, 1987, J VAC SCI TECHNOL AS, P1783

[10]

YIN ZY, 1982, APPL OPTICS, V21, P4324, DOI 10.1364/AO.21.004324

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