X-RAY PHOTOELECTRON-SPECTROSCOPY OF O 1S AND SI 2P LINES IN FILMS OF SIOX FORMED BY ELECTRON-BEAM EVAPORATION

被引：29

作者：

SUN, YN

FELDMAN, A

FARABAUGH, EN

机构：

来源：

THIN SOLID FILMS | 1988年 / 157卷 / 02期

关键词：

D O I：

10.1016/0040-6090(88)90016-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：351 / 360

页数：10

共 15 条

[1] CHEMICAL-STATES STUDY OF SI IN SIOX FILMS GROWN BY PECVD [J].

CHAO, SS ;

TAKAGI, Y ;

LUCOVSKY, G ;

PAI, P ;

CUSTER, RC ;

TYLER, JE ;

KEEM, JE .

APPLIED SURFACE SCIENCE, 1986, 26 (04) :575-583

[2] A STUDY OF CHEMICAL BONDING IN SUBOXIDES OF SILICON USING AUGER-ELECTRON SPECTROSCOPY [J].

CHAO, SS ;

TYLER, JE ;

TAKAGI, Y ;

PAI, PG ;

LUCOVSKY, G ;

LIN, SY ;

WONG, CK ;

MANTINI, MJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :1574-1579

[3] CHEMICAL-BOND AND RELATED PROPERTIES OF SIO2 .8. EXPERIMENTAL AND THEORETICAL INVESTIGATION OF THE STRUCTURE OF SIOX [J].

ENGELKE, R ;

ROY, T ;

NEUMANN, HG ;

HUBNER, K .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1981, 65 (01) :271-280

[4] CHARACTERIZATION OF AMORPHOUS SIOX LAYERS WITH ESCA [J].

FINSTER, J ;

SCHULZE, D ;

MEISEL, A .

SURFACE SCIENCE, 1985, 162 (1-3) :671-679

[5] LOCAL ATOMIC AND ELECTRONIC-STRUCTURE OF OXIDE-GAAS AND SIO2-SI INTERFACES USING HIGH-RESOLUTION XPS [J].

GRUNTHANER, FJ ;

GRUNTHANER, PJ ;

VASQUEZ, RP ;

LEWIS, BF ;

MASERJIAN, J ;

MADHUKAR, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1443-1453

[6] CRYSTALLOGRAPHIC STUDY OF SEMI-INSULATING POLYCRYSTALLINE SILICON (SIPOS) DOPED WITH OXYGEN-ATOMS [J].

HAMASAKI, M ;

ADACHI, T ;

WAKAYAMA, S ;

KIKUCHI, M .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) :3987-3992

[7] METASTABLE MOLECULAR PRECURSOR FOR THE DISSOCIATIVE ADSORPTION OF OXYGEN ON SI(111) [J].

HOFER, U ;

MORGEN, P ;

WURTH, W ;

UMBACH, E .

PHYSICAL REVIEW LETTERS, 1985, 55 (27) :2979-2982

[8] EFFECT OF HEAT-TREATMENT ON CHEMICAL AND ELECTRONIC-STRUCTURE OF SOLID SIO - ELECTRON-SPECTROSCOPY STUDY [J].

HOLLINGER, G ;

JUGNET, Y ;

DUC, TM .

SOLID STATE COMMUNICATIONS, 1977, 22 (05) :277-280

[9] SI(111) SURFACE OXIDATION - O-1S CORE-LEVEL STUDY USING SYNCHROTRON RADIATION [J].

HOLLINGER, G ;

MORAR, JF ;

HIMPSEL, FJ ;

HUGHES, G ;

JORDAN, JL .

SURFACE SCIENCE, 1986, 168 (1-3) :609-616

[10]

HOLLINGER G, 1974, AIP C P, V20, P102

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