CHEMICAL-STATES STUDY OF SI IN SIOX FILMS GROWN BY PECVD

被引：62

作者：

CHAO, SS

TAKAGI, Y

LUCOVSKY, G

PAI, P

CUSTER, RC

TYLER, JE

KEEM, JE

机构：

[1] Energy Conversion Devices Inc, Troy,, MI, USA, Energy Conversion Devices Inc, Troy, MI, USA

来源：

关键词：

D O I：

10.1016/0169-4332(86)90128-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：575 / 583

页数：9

共 30 条

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