SEARCHING FOR OPTIMUM CONDITIONS IN THE LASER WRITING OF SMALL OHMIC CONTACTS

被引：24

作者：

GARRIDOSUAREZ, C ^{[1
]}

BRAICHOTTE, D ^{[1
]}

VANDENBERGH, H ^{[1
]}

机构：

[1] ECOLE POLYTECH FED LAUSANNE,CHIM TECH LAB,CH-1015 LAUSANNE,SWITZERLAND

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 46卷 / 04期

关键词：

D O I：

10.1007/BF01210348

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：285 / 290

页数：6

共 7 条

[1]

BAUERLE D, 1986, SPRINGER SER MAT SCI, V1

BRAICHOTTE, D ;

VANDENBERGH, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 44 (04) :353-359

BRAICHOTTE, D ;

VANDENBERGH, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (04) :337-343

[4]

BRAICHOTTE D, 1987, P NATO WORKSHOP EMER

[5]

EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718

[6] LCVD OF COPPER - DEPOSITION RATES AND DEPOSIT SHAPES [J].

MOYLAN, CR ;

BAUM, TH ;

JONES, CR .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 40 (01) :1-5

OSGOOD, RM .