ELECTRON-SPIN-RESONANCE STUDY OF E-TRAPPING CENTERS IN SIMOX BURIED OXIDES

被引：47

作者：

CONLEY, JF ^{[1
]}

LENAHAN, PM ^{[1
]}

ROITMAN, P ^{[1
]}

机构：

[1] NATL INST STAND & TECHNOL,GAITHERSBURG,MD 20899

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1991年 / 38卷 / 06期

关键词：

D O I：

10.1109/23.124100

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We combine electron spin resonance and capacitance versus voltage measurements with vacuum ultraviolet and ultraviolet illumination sequences to study E' centers in a variety of SIMOX buried oxides. The oxides had all been annealed above 1300-degrees-C. Our results clearly show that E' centers play an important, probably dominating role in the trapping behavior of these oxides. This role is considerably different from the role that E' centers play in thermal oxides.

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页码：1247 / 1252

页数：6

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