IMPROVEMENT OF DARK CURRENT OF GA(AL)SB MESA DIODES USING (NH4)(2)S TREATMENT

被引:13
作者
PEROTIN, M [1 ]
COUDRAY, P [1 ]
ETCHEBERRY, A [1 ]
GOUSKOV, L [1 ]
DEBIEMMECHOUVY, C [1 ]
LUQUET, H [1 ]
机构
[1] CNRS,CHIM & ELECTROCHIM MAT INORGAN LAB,F-92190 MEUDON,FRANCE
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1994年 / 28卷 / 1-3期
关键词
GALLIUM ANTIMONIDES; SURFACE DEFECTS; P-N JUNCTIONS; X-RAY SPECTROSCOPY;
D O I
10.1016/0921-5107(94)90086-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effects of chemical sulphuration on GaSb mesa photodiodes performanance were investigated by electrical characterization. (NH4)(2)S treatment was found to be very effective in reducing the reverse dark currents by one module value, leading them down to 1 = 0.2 mu A (V = 1 V) for a Phi = 60 mu m diameter diode. The capacitance variation versus frequency, investigated from 10 kHz to 10 MHz, becomes flat over the whole range of frequency, attesting of a volume conduction mechanism. These performances exhibited a remarkable stability during 1 year, without encapsulation. The X-ray photoelectron spectrum of the Sb 3d level shows that after (NH4)(2)S treatment the surface is free of native Sb oxides, Sb-S bonds being created by the adsorption of sulphur atoms on the surface. These surface modifications are responsible for the observed improvement in characteristics and their stability.
引用
收藏
页码:374 / 378
页数:5
相关论文
共 16 条
[1]   OPTICAL-PROPERTIES OF ANODICALLY GROWN NATIVE OXIDES ON SOME GA-V COMPOUNDS FROM 1.5 TO 6.0 EV [J].
ASPNES, DE ;
SCHWARTZ, B ;
STUDNA, AA ;
DERICK, L ;
KOSZI, LA .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) :3510-3513
[2]  
BUGLASS JG, 1986, J ELECTROCHEM SOC SO, P2565
[3]  
COUDRAY P, 1993, THESIS MONTPELLIER U
[4]   IMPACT IONIZATION IN GA1-XALXSB [J].
GOUSKOV, L ;
ORSAL, B ;
PEROTIN, M ;
KARIM, M ;
SABIR, A ;
COUDRAY, P ;
KIBEYA, S ;
LUQUET, H .
APPLIED PHYSICS LETTERS, 1992, 60 (24) :3030-3032
[5]   MEASUREMENT OF THE IMPACT IONIZATION RATES IN AL0.06GA0.94SB [J].
KUWATSUKA, H ;
MIKAWA, T ;
MIURA, S ;
YASUOKA, N ;
KITO, Y ;
TANAHASHI, T ;
WADA, O .
APPLIED PHYSICS LETTERS, 1990, 57 (03) :249-251
[6]   GASB-OXIDE REMOVAL AND SURFACE PASSIVATION USING AN ELECTRON-CYCLOTRON RESONANCE HYDROGEN SOURCE [J].
LU, Z ;
JIANG, Y ;
WANG, WI ;
TEICH, MC ;
OSGOOD, RM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04) :1856-1861
[7]   RESONANT INTERBAND COUPLING IN SINGLE-BARRIER HETEROSTRUCTURES OF INAS/GASB/INAS AND GASB/INAS/GASB [J].
LUO, LF ;
BERESFORD, R ;
LONGENBACH, KF ;
WANG, WI .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (06) :2854-2857
[8]   IONIZATION COEFFICIENTS IN GA0.96AL0.04SB [J].
LUQUET, H ;
PEROTIN, M ;
GOUSKOV, L ;
LLINARES, C ;
ARCHIDI, H ;
LAHBABI, M ;
KARIM, M ;
MBOW, B .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) :3861-3864
[9]   LIQUID-PHASE-EPITAXIAL GROWTH OF GA0.96AL0.04SB - ELECTRICAL AND PHOTOELECTRICAL CHARACTERIZATIONS [J].
LUQUET, H ;
GOUSKOV, L ;
PEROTIN, M ;
JEAN, A ;
RJEB, A ;
ZAROURI, T ;
BOUGNOT, G .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (10) :3582-3591
[10]   ESCA STUDIES OF GA, AS, GAAS, GA2O3, AS2O3 AND AS2O5 [J].
MIZOKAWA, Y ;
IWASAKI, H ;
NISHITANI, R ;
NAKAMURA, S .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1978, 14 (02) :129-141