共 16 条
[2]
BUGLASS JG, 1986, J ELECTROCHEM SOC SO, P2565
[3]
COUDRAY P, 1993, THESIS MONTPELLIER U
[6]
GASB-OXIDE REMOVAL AND SURFACE PASSIVATION USING AN ELECTRON-CYCLOTRON RESONANCE HYDROGEN SOURCE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (04)
:1856-1861
[8]
IONIZATION COEFFICIENTS IN GA0.96AL0.04SB
[J].
JOURNAL OF APPLIED PHYSICS,
1990, 68 (08)
:3861-3864