STATUS OF THIN-FILM INTEGRATED-CIRCUIT TECHNOLOGY

被引：6

作者：

BASSECHES, H

GERSTENBERG, D

机构：

来源：

THIN SOLID FILMS | 1972年 / 12卷 / 02期

关键词：

D O I：

10.1016/0040-6090(72)90093-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：295 / +

页数：1

共 65 条

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