MISFIT DISLOCATIONS IN BICRYSTAL SYSTEM SILICON-BORON-DOPED SILICON

被引:12
作者
SUGITA, Y
TAMURA, M
SUGAWARA, K
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 04期
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D O I
10.1116/1.1315690
中图分类号
O59 [应用物理学];
学科分类号
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页码:585 / &
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