ARSENIC EMITTER STRUCTURE FOR HIGH-PERFORMANCE SILICON TRANSISTORS

被引：7

作者：

GHOSH, HN

OBERAI, AS

CHANG, JJ

VORA, MB

机构：

来源：

IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1971年 / 15卷 / 06期

关键词：

D O I：

10.1147/rd.156.0457

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

收藏

页码：457 / +

页数：1

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