INVESTIGATION OF MODULATED RADIO-FREQUENCY PLASMA-ETCHING OF GAAS USING LANGMUIR PROBES

被引：4

作者：

LAW, VJ

BRAITHWAITE, NS

INGRAM, SG

CLARY, DC

JONES, GAC

机构：

[1] OPEN UNIV,MAT DISCIPLINE,MILTON KEYNES,BUCKS,ENGLAND

[2] GEC LTD,HIRST RES CTR,BOREHAMWOOD WD6 1RX,HERTS,ENGLAND

[3] UNIV CAMBRIDGE,DEPT CHEM,CAMBRIDGE CB2 1EW,ENGLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587623

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3337 / 3341

页数：5

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