2-COLOR LIGHT-EMITTING-DIODE SOURCE FOR HIGH-PRECISION PHASE-SHIFTING INTERFEROMETRY

被引：6

作者：

DECK, L

DEMAREST, F

机构：

[1] Zygo Corporation, Middlefield, CT, 06455-0448, Laurel Brook Road

来源：

OPTICS LETTERS | 1993年 / 18卷 / 22期

关键词：

D O I：

10.1364/OL.18.001899

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe a two-color light-emitting-diode source that provides intense, uniform, and highly stable illumination with a wavelength precision sufficient for multiwavelength phase-shifting interferometry applications. The source has feedback-stabilized intensity and junction temperature sensing for wavelength compensation. It has a theoretical mean time between failure of more than 30,000 h, and the two colors provide a step measurement capability of greater than 2.5 mum. Measurements made with this source in an interferometric microscope show subangstrom repeatability.

引用

页码：1899 / 1901

页数：3

共 9 条

[1]

BIEGEN JF, 1988, SURF TOPOGRAPHY, V1, P469

[2] EFFECT OF INTENSITY ERROR CORRELATION ON THE COMPUTED PHASE OF PHASE-SHIFTING INTERFEROMETRY [J].