OPTICAL AND COMPOSITIONAL STUDIES OF BURIED OXIDE LAYERS IN SILICON FORMED BY HIGH-DOSE IMPLANTATION

被引：8

作者：

CHATER, RJ

KILNER, JA

SCHEID, E

CRISTOLOVENEAU, S

HEMMENT, PLF

REESON, KJ

机构：

[1] ECOLE NATL SUPER ELECTR & RADIOELECT,PHYS COMPOSANTS SEMICOND LAB,F-38031 GRENOBLE,FRANCE

[2] UNIV SURREY,DEPT ELECT & ELECTR ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

APPLIED SURFACE SCIENCE | 1987年 / 30卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(87)90116-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：390 / 396

页数：7

共 8 条

[1] FORMATION OF BURIED INSULATING LAYERS BY HIGH-DOSE OXYGEN IMPLANTATION UNDER CONTROLLED TEMPERATURE CONDITIONS [J].

BRUEL, M ;

MARGAIL, J ;

STOEMENOS, J ;

MARTIN, P ;

JAUSSAUD, C .

VACUUM, 1985, 35 (12) :589-593

[2]

CHATER RJ, 1987, NUCL INSTR METHODS, V19, P443

[3]

CHATER RJ, 1986, ELECTROCHEM SOC P, V84, P652

[4] SIMS ANALYSIS OF SILICON INSULATOR STRUCTURES FORMED BY HIGH-DOSE O+ IMPLANTATION INTO SILICON [J].

KILNER, JA ;

LITTLEWOOD, SD ;

HEMMENT, PLF ;

MAYDELLONDRUSZ, E ;

STEPHENS, KG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :573-578

[5] SIMS AND O-18 TRACER STUDIES OF THE REDISTRIBUTION OF OXYGEN IN BURIED SIO2 LAYERS FORMED BY HIGH-DOSE IMPLANTATION [J].

KILNER, JA ;

CHATER, RJ ;

HEMMENT, PLF ;

PEART, RF ;

MAYDELLONDRUSZ, EA ;

TAYLOR, MR ;

ARROWSMITH, RP .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :293-298

[6] SIMS ANALYSIS OF BURIED SILICON-NITRIDE LAYERS FORMED BY HIGH-DOSE IMPLANTATION OF N-14 AND N-15 [J].

KILNER, JA ;

CHATER, RJ ;

HEMMENT, PLF ;

PEART, RF ;

REESON, KJ ;

ARROWSMITH, RP ;

DAVIS, JR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :214-217

[7] DEPTH PROFILES OF THE OPTICAL-PROPERTIES OF BURIED OXIDES (SIMOX) BY ELLIPSOMETRY [J].

LEVY, M ;

SCHEID, E ;

CRISTOLOVEANU, S .

THIN SOLID FILMS, 1987, 148 (02) :127-134

[8]

MARSH CD, 1986, P EURO MATS RES SOC, P137

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