SIMS ANALYSIS OF SILICON INSULATOR STRUCTURES FORMED BY HIGH-DOSE O+ IMPLANTATION INTO SILICON

被引：20

作者：

KILNER, JA ^{[1
]}

LITTLEWOOD, SD ^{[1
]}

HEMMENT, PLF ^{[1
]}

MAYDELLONDRUSZ, E ^{[1
]}

STEPHENS, KG ^{[1
]}

机构：

[1] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期

关键词：

D O I：

10.1016/0167-5087(83)91045-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：573 / 578

页数：6

共 17 条

[1] FORMATION OF BURIED INSULATING LAYERS IN SILICON BY THE IMPLANTATION OF HIGH-DOSES OF OXYGEN
HEMMENT, PLF
MAYDELLONDRUSZ, E
STEPHENS, KG
BUTCHER, J
IOANNOU, D
ALDERMAN, J
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 157 - 164
[2] HEMMENT PLF, 1982, P INT C ION BEAM MOD
[3] HEMMENT PLF, 1983, UNPUB VACUUM
[4] REDISTRIBUTION OF IMPLANTED OXYGEN AND CARBON IN SILICON
KOYAMA, H
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) : 3202 - 3205
[5] MAGEE CW, 1982, SECONDARY ION MASS S, V3, P172
[6] LOW-TEMPERATURE REDISTRIBUTION AND GETTERING OF OXYGEN IN SILICON
MAGEE, TJ
LEUNG, C
KAWAYOSHI, H
FURMAN, B
HOPKINS, CG
EVANS, CA
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (08) : 5392 - 5394
[7] THERMAL REDISTRIBUTION OF OXYGEN DURING SOLID-PHASE REGROWTH OF ARSENIC-IMPLANTED AMORPHIZED SI
MAGEE, TJ
LEUNG, C
KAWAYOSHI, H
ORMOND, R
FURMAN, BK
EVANS, CA
DAY, DS
[J]. APPLIED PHYSICS LETTERS, 1981, 39 (05) : 413 - 415
[8] THE ROLE OF STABILIZED BACK-SURFACE DAMAGE IN CONTROLLING INTERNAL SIOX NUCLEATION AND DENUDATION ZONES IN SI
MAGEE, TJ
LEUNG, C
KAWAYOSHI, H
FURMAN, BK
EVANS, CA
[J]. APPLIED PHYSICS LETTERS, 1981, 39 (08) : 631 - 633
[9] GETTERING OF MOBILE OXYGEN AND DEFECT STABILITY WITHIN BACK-SURFACE DAMAGE REGIONS IN SI
MAGEE, TJ
LEUNG, C
KAWAYOSHI, H
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (11) : 891 - 893
[10] GETTERING OF MOBILE OXYGEN AND DEFECT STABILITY WITHIN BACK-SURFACE DAMAGE REGIONS IN SI - REPLY
MAGEE, TJ
FURMAN, BK
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (02) : 1227 - 1228

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