EVIDENCE THAT BLUE LUMINESCENCE OF OXIDIZED POROUS SILICON ORIGINATES FROM SIO2

被引：168

作者：

KONTKIEWICZ, AJ ^{[1
]}

KONTKIEWICZ, AM ^{[1
]}

SIEJKA, J ^{[1
]}

SEN, S ^{[1
]}

NOWAK, G ^{[1
]}

HOFF, AM ^{[1
]}

SAKTHIVEL, P ^{[1
]}

AHMED, K ^{[1
]}

MUKHERJEE, P ^{[1
]}

WITANACHCHI, S ^{[1
]}

LAGOWSKI, J ^{[1
]}

机构：

[1] UNIV S FLORIDA,DEPT PHYS,TAMPA,FL 33620

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 11期

关键词：

D O I：

10.1063/1.112973

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have analyzed red and blue luminescence from porous silicon as a function of oxidation parameters and feature dimension determined with an atomic force microscope. We have found correlation between blue luminescence intensity and the increase in feature size caused by oxidation. We have further shown that blue luminescence, is identical, with respect to spectrum and fast decay, to that of high microelectronic quality SiO2 grown on crystalline silicon using dry oxygen plus an organic chlorine compound. Thus, we conclude that blue luminescence originates from SiO2 filM rather than from the silicon nanocrystals in the porous material. Intensity enhancement, as compared to SiO2 on crystalline wafers, comes from the gigantic surface area of porous silicon.

引用

页码：1436 / 1438

页数：3

共 17 条

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