CRN AND (TI,AL)N COATINGS DEPOSITED BY THE STEERED ARC AND RANDOM ARC TECHNIQUES

被引:41
作者
ERTURK, E
HEUVEL, HJ
DEDERICHS, HG
机构
关键词
D O I
10.1016/S0257-8972(89)80005-2
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:435 / 444
页数:10
相关论文
共 12 条
[1]   HARD CHROME AND MOLYBDENUM COATINGS PRODUCED BY PHYSICAL VAPOR-DEPOSITION [J].
AUBERT, A ;
DANROC, J ;
GAUCHER, A ;
TERRAT, JP .
THIN SOLID FILMS, 1985, 126 (1-2) :61-67
[2]   CHARACTERIZATION AND WEAR-RESISTANCE OF COATINGS IN THE CR-C-N TERNARY-SYSTEM DEPOSITED BY PHYSICAL VAPOR-DEPOSITION [J].
CHOLVY, G ;
DEREP, JL ;
GANTOIS, M .
THIN SOLID FILMS, 1985, 126 (1-2) :51-60
[3]   COMPARISON OF THE STEERED ARC AND RANDOM ARC TECHNIQUES [J].
ERTURK, E ;
HEUVEL, HJ ;
DEDERICHS, HG .
SURFACE & COATINGS TECHNOLOGY, 1989, 39 (1-3) :455-464
[4]  
FRELLER H, 1987, THIN OLID FILMS, V53, P67
[5]   HARD CHROME COATINGS DEPOSITED BY PHYSICAL VAPOR-DEPOSITION [J].
GILLET, R ;
AUBERT, A ;
GAUCHER, A .
METALS TECHNOLOGY, 1983, 10 (MAR) :115-118
[6]   MICROSTRUCTURE AND PHYSICAL-PROPERTIES OF POLYCRYSTALLINE METASTABLE TI0.5AL0.5N ALLOYS GROWN BY DC MAGNETRON SPUTTER DEPOSITION [J].
HAKANSSON, G ;
SUNDGREN, JE ;
MCINTYRE, D ;
GREENE, JE ;
MUNZ, WD .
THIN SOLID FILMS, 1987, 153 :55-65
[7]   MORPHOLOGY AND PROPERTIES OF SPUTTERED (TI,AL)N LAYERS ON HIGH-SPEED STEEL SUBSTRATES AS A FUNCTION OF DEPOSITION TEMPERATURE AND SPUTTERING ATMOSPHERE [J].
JEHN, HA ;
HOFMANN, S ;
RUCKBORN, VE ;
MUNZ, WD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2701-2705
[8]   ON STRUCTURE AND PROPERTIES OF SPUTTERED TI AND AL BASED HARD COMPOUND FILMS [J].
KNOTEK, O ;
BOHMER, M ;
LEYENDECKER, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2695-2700
[9]  
Knotek O., 1986, High Temperatures - High Pressures, V18, P435
[10]   WEAR-RESISTANCE OF ARC-EVAPORATED AND MAGNETRON-SPUTTERED COATINGS ON CEMENTED CARBIDES [J].
KNOTEK, O ;
ATZOR, M ;
JUNGBLUT, F ;
PRENGEL, HG .
SURFACE & COATINGS TECHNOLOGY, 1989, 39 (1-3) :445-453