INFLUENCE OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING

[1] DEPTH RESOLUTION OF SPUTTER PROFILING [J]. APPLIED PHYSICS, 1979, 18 (02): : 131 - 140

[2] ANDERSEN HH, 1984, ION IMPLANTATION BEA, P128

[3] [Anonymous], 1963, KGL DANSKE VIDENSKAB

[4] BRIGGS D, 1983, PRACTICAL SURFACE AN

[5] EFFECT OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING [J]. APPLIED PHYSICS LETTERS, 1988, 53 (14) : 1346 - 1348

[6] FROM CASCADE TO SPIKE - A FRACTAL-GEOMETRY APPROACH [J]. PHYSICAL REVIEW LETTERS, 1987, 58 (20) : 2083 - 2086

[7] INFLUENCE OF CHEMICAL DRIVING FORCES IN ION MIXING OF METALLIC BILAYERS [J]. APPLIED PHYSICS LETTERS, 1984, 45 (02) : 185 - 187

[8] CHENG YT, 1987, MATER RES SOC S P, V74, P419

[9] INTERDIFFUSION STUDY OF HGTE-HGCDTE SUPERLATTICE .1. LOW-TEMPERATURE AUGER SPUTTER DEPTH PROFILING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2631 - 2636

[10] CIRLIN EH, IN PRESS

[1] DEPTH RESOLUTION OF SPUTTER PROFILING [J]. APPLIED PHYSICS, 1979, 18 (02): : 131 - 140

[2] ANDERSEN HH, 1984, ION IMPLANTATION BEA, P128

[3] [Anonymous], 1963, KGL DANSKE VIDENSKAB

[4] BRIGGS D, 1983, PRACTICAL SURFACE AN

[5] EFFECT OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING [J]. APPLIED PHYSICS LETTERS, 1988, 53 (14) : 1346 - 1348

[6] FROM CASCADE TO SPIKE - A FRACTAL-GEOMETRY APPROACH [J]. PHYSICAL REVIEW LETTERS, 1987, 58 (20) : 2083 - 2086

[7] INFLUENCE OF CHEMICAL DRIVING FORCES IN ION MIXING OF METALLIC BILAYERS [J]. APPLIED PHYSICS LETTERS, 1984, 45 (02) : 185 - 187

[8] CHENG YT, 1987, MATER RES SOC S P, V74, P419

[9] INTERDIFFUSION STUDY OF HGTE-HGCDTE SUPERLATTICE .1. LOW-TEMPERATURE AUGER SPUTTER DEPTH PROFILING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2631 - 2636

[10] CIRLIN EH, IN PRESS