INFLUENCE OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING

[31] THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN COMPOSITION DEPTH PROFILING WITH AUGER-ELECTRON SPECTROSCOPY [J]. SURFACE AND INTERFACE ANALYSIS, 1983, 5 (01) : 33 - 37

[32] SEAH MP, 1983, PRACTICAL SURFACE AN, P181

[33] THEORETICAL ASPECTS OF ATOMIC MIXING BY ION-BEAMS [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 25 - 41

[34] SIMKO SJ, COMMUNICATION

[35] VANROSSUM M, 1988, ION IMPLANTATION 198, P1

[36] THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN SPUTTER PROFILING [J]. SURFACE AND INTERFACE ANALYSIS, 1982, 4 (01) : 1 - 7

[37] IMPLANTATION AND ION-BEAM MIXING IN THIN-FILM ANALYSIS [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 15 - 24

[38] WINTERBON K, 1970, KGL DANSKE VIDENSKAB, V37, P1

[39] EFFECT OF THERMODYNAMICS ON ION MIXING [J]. APPLIED PHYSICS LETTERS, 1987, 50 (21) : 1485 - 1487

[40] AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING DURING SAMPLE ROTATION [J]. SURFACE AND INTERFACE ANALYSIS, 1986, 9 (1-6) : 41 - 46

[31] THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN COMPOSITION DEPTH PROFILING WITH AUGER-ELECTRON SPECTROSCOPY [J]. SURFACE AND INTERFACE ANALYSIS, 1983, 5 (01) : 33 - 37

[32] SEAH MP, 1983, PRACTICAL SURFACE AN, P181

[33] THEORETICAL ASPECTS OF ATOMIC MIXING BY ION-BEAMS [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 25 - 41

[34] SIMKO SJ, COMMUNICATION

[35] VANROSSUM M, 1988, ION IMPLANTATION 198, P1

[36] THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN SPUTTER PROFILING [J]. SURFACE AND INTERFACE ANALYSIS, 1982, 4 (01) : 1 - 7

[37] IMPLANTATION AND ION-BEAM MIXING IN THIN-FILM ANALYSIS [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 15 - 24

[38] WINTERBON K, 1970, KGL DANSKE VIDENSKAB, V37, P1

[39] EFFECT OF THERMODYNAMICS ON ION MIXING [J]. APPLIED PHYSICS LETTERS, 1987, 50 (21) : 1485 - 1487

[40] AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING DURING SAMPLE ROTATION [J]. SURFACE AND INTERFACE ANALYSIS, 1986, 9 (1-6) : 41 - 46