IMPLANTATION AND ION-BEAM MIXING IN THIN-FILM ANALYSIS

被引：82

作者：

WILLIAMS, P

BAKER, JE

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1981年 / 182卷 / APR期

关键词：

D O I：

10.1016/0029-554X(81)90667-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：15 / 24

页数：10

共 37 条

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