CHARACTERIZATION AND PROCESSING OF BIPOLAR SEMICONDUCTOR ELECTRODES IN A DUAL ELECTROLYTE CELL

被引:9
作者
CATTARIN, S
MUSIANI, MM
机构
[1] Istituto di Polarografia ed Elettrochirnica Preparativa del C.N.R.
关键词
D O I
10.1149/1.2048414
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Photoelectrochemical (PEG) processes may be induced at both faces of a bipolar semiconductor electrode without application of metal contacts by using the dual electrolyte arrangement metal/electrolyte 1/semiconductor/electrolyte 2/metal and by applying a voltage to the end metal electrodes. The possibilities of semiconductor characterization (determination of action spectra and doping level) and processing (photoetching and metal electrodeposition) are discussed on the basis of model experiments, performed with n-InP wafers. The advantages of this approach over traditional PEC and electroless techniques are discussed with particular emphasis on etching.
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页码:3786 / 3792
页数:7
相关论文
共 32 条
[1]   CHEMICAL ETCHING CHARACTERISTICS OF (001)INP [J].
ADACHI, S ;
KAWAGUCHI, H .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (06) :1342-1349
[2]   PHOTOELECTROCHEMISTRY AND HETEROGENEOUS PHOTOCATALYSIS AT SEMICONDUCTORS [J].
BARD, AJ .
JOURNAL OF PHOTOCHEMISTRY, 1979, 10 (01) :59-75
[3]   PHOTOELECTROLYSIS AND PHYSICAL-PROPERTIES OF SEMICONDUCTING ELECTRODE WO3 [J].
BUTLER, MA .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (05) :1914-1920
[4]   CATHODIC DEPOSITION OF TERNARY IN+AS+SB ALLOYS AND FORMATION OF INASXSB1-X [J].
CATTARIN, S ;
MUSIANI, MM ;
CASELLATO, U ;
GUERRIERO, P ;
BERTONCELLO, R .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1995, 380 (1-2) :209-218
[5]   CUINS2 WITH LAMELLAR MORPHOLOGY .1. EFFICIENT PHOTOANODES IN ACIDIC POLYIODIDE MEDIUM [J].
CATTARIN, S ;
DIETZ, N ;
LEWERENZ, HJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (05) :1095-1099
[6]   MODELING OF BIPOLAR SEMICONDUCTOR PHOTOELECTRODE ARRAYS FOR ELECTROLYTIC PROCESSES [J].
CERVERAMARCH, S ;
SMOTKIN, ES ;
BARD, AJ ;
CAMPION, A ;
FOX, MA ;
MALLOUK, T ;
WEBBER, SE ;
WHITE, JM .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (03) :567-573
[7]   MASS-TRANSFER TO AN IMPINGING JET ELECTRODE [J].
CHIN, DT ;
TSANG, CH .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (09) :1461-1470
[8]   FROM PHOTOCORROSION TO PHOTOELECTROCHEMICAL ETCHING [J].
DECKER, F ;
SOLTZ, DA ;
CESCATO, L .
ELECTROCHIMICA ACTA, 1993, 38 (01) :95-99
[9]  
GERISCHER H, 1979, TOPICS APPLIED PHYSI
[10]  
GERISCHER H, 1970, PHYSICAL CHEM ADV A, V9, pCH5