CHEMICAL ETCHING CHARACTERISTICS OF (001)INP

被引:142
作者
ADACHI, S
KAWAGUCHI, H
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D O I
10.1149/1.2127633
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1342 / 1349
页数:8
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