PB(ZR.TI)O3 FILMS BY RF SPUTTERING IN PBO VAPOR

被引:17
作者
SHINTANI, Y
SATO, K
SAKAMOTO, M
FUKUDA, H
TADA, O
机构
[1] TOKUSHIMA UNIV,FAC EDUC,TOKUSHIMA 770,JAPAN
[2] TOKUSHIMA UNIV,FAC ENGN,TOKUSHIMA 770,JAPAN
关键词
D O I
10.1143/JJAP.17.573
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:573 / 574
页数:2
相关论文
共 4 条
[1]   PREPARATION AND PROPERTIES OF FERROELECTRIC PLZT THIN-FILMS BY RF SPUTTERING [J].
ISHIDA, M ;
MATSUNAMI, H ;
TANAKA, T .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) :951-953
[2]   PREPARATION OF PLZT THIN-FILMS BY RF SPUTTERING [J].
MATSUNAMI, H ;
SUZUKI, M ;
ISHIDA, M ;
TANAKA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (06) :1163-1164
[3]   PREPARATION OF PB(ZR,TI)O3 THIN-FILMS BY AN ELECTRON-BEAM EVAPORATION TECHNIQUE [J].
OIKAWA, M ;
TODA, K .
APPLIED PHYSICS LETTERS, 1976, 29 (08) :491-492
[4]   FERROELECTRIC PLZT THIN-FILMS FABRICATED BY RF SPUTTERING [J].
TANAKA, K ;
HIGUMA, Y ;
YOKOYAMA, K ;
NAKAGAWA, T ;
HAMAKAWA, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (07) :1381-1382