HIGH-RESOLUTION COMPOSITION PROFILES OF MULTILAYERS

被引:2
作者
BAUMANN, FH [1 ]
GRIBELYUK, M [1 ]
KIM, Y [1 ]
KISIELOWSKI, C [1 ]
MAURICE, JL [1 ]
RAU, WD [1 ]
RENTSCHLER, JA [1 ]
SCHWANDER, P [1 ]
OURMAZD, A [1 ]
机构
[1] AT&T BELL LABS,HOLMDEL,NJ 07733
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1995年 / 150卷 / 01期
关键词
D O I
10.1002/pssa.2211500105
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We describe how the transmission electron microscope may be used to obtain composition profiles of materials with atomic layer spatial resolution and high chemical sensitivity. Two approaches are outlined. Chemical mapping is applicable to chemically ordered solids, in which compositional changes occur on a subset of lattice sites. Such materials produce chemical reflections, which may be used to measure the composition with near-atomic sensitivity. QUANTITEM is applicable to chemically disordered materials, with no chemical reflections. This approach maps thickness changes in samples of uniform composition, and compositional changes in inhomogeneous materials. The discussion is qualitative to avoid mathematical complexity, and is illustrated by representative examples.
引用
收藏
页码:31 / 50
页数:20
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