GENERATION OF 3-DIMENSIONAL FREESTANDING METAL MICRO-OBJECTS BY LASER CHEMICAL-PROCESSING

被引：44

作者：

LEHMANN, O

STUKE, M

机构：

[1] Max-Planck-Institut für biophysikalische Chemie, Göttingen, W-3400

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1991年 / 53卷 / 04期

关键词：

D O I：

10.1007/BF00357199

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Three-dimensional free-standing metal micro-objects were created using Laser Chemical Vapor Deposition (LCVD) of aluminum from aluminum-trihydride-trimethylamine. A dense grid of thin lines (about 10-mu-m diameter) was deposited on a pre-formed polycarbonate substrate. The substrate was removed by dissolving it in a suitable solvent after ablating an unsoluble by-product by UV excimer laser pulses. The result is a free-standing three-dimensional aluminum grid micro-structure.

引用

页码：343 / 345

页数：3

共 8 条

[1] LASER-ASSISTED DEPOSITION FOR ELECTRONIC PACKAGING APPLICATIONS [J].