2-STEP GENERATION OF ALUMINUM MICROSTRUCTURES ON LASER-GENERATED PD PRE-NUCLEATION PATTERNS USING THERMAL CVD FROM (TRIMETHYLAMINE)TRIHYDRIDOALUMINUM

Communication: Aluminum microstructures, important in electronics packaging applications, can be efficiently produced using a new two-step method which involves thermal CVD from (trimethylamine)trihydridoaluminum onto lasergenerated spatially selective prenucleation patterns of a palladium catalyst. Interestingly, the aluminum continues to grow to heights of more than a few nanometers even after it has completely covered the palladium catalyst.