SELECTIVE AMPLIFICATION OF SELF-RESISTIVELY HEATED LASER-DIRECT-WRITTEN TUNGSTEN LINES

被引：14

作者：

GOTTSLEBEN, O

STUKE, M

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 26期

关键词：

D O I：

10.1063/1.99768

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2230 / 2232

页数：3

共 13 条

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[4] HIGH-ACCURACY TUNING OF PLANAR MILLIMETER-WAVE CIRCUITS BY LASER PHOTOCHEMICAL ETCHING [J].

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[5]

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Moriya T., 1983, International Electron Devices Meeting 1983. Technical Digest, P550

[10] KINETICS AND PROPERTIES OF CHEMICALLY VAPOR-DEPOSITED TUNGSTEN FILMS ON SILICON SUBSTRATES [J].

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