ANALYSIS ON TWIN-MASS STRUCTURE FOR A PIEZORESISTIVE ACCELEROMETER

被引:26
作者
SHEN, SQ [1 ]
CHEN, J [1 ]
BAO, MH [1 ]
机构
[1] FUDAN UNIV,DEPT ELECTR ENGN,MICROELECTR SECT,SHANGHAI,PEOPLES R CHINA
关键词
D O I
10.1016/0924-4247(92)80181-2
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel mechanical structure for a piezoresistive silicon accelerometer is described and analysed. This structure consists of two seismic masses instead of one and five beams instead of the two or four in existing designs. The single sign and uniform profile of the stress at the central beam makes it ideal for locating sensing elements. Analytical analyses show that no lateral sensitivity can be caused by an acceleration in the beam direction and the sensitivity caused by a lateral acceleration vertical to the beam direction is also eliminated to the first order of approximation by a symmetrical design of the sensing elements. Both the normal sensitivity and basic resonance frequency of the structure are in between those of the cantilever beam structure and the double-side-supported structure, but the figure of merit, i.e., the sensitivity-frequency product, is higher for the two-mass structure than for the other two structures.
引用
收藏
页码:101 / 107
页数:7
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