THERMAL-OXIDATION OF INP AND PROPERTIES OF OXIDE FILM

被引:64
作者
YAMAGUCHI, M
ANDO, K
机构
关键词
D O I
10.1063/1.328380
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:5007 / 5012
页数:6
相关论文
共 22 条
[1]  
BARIN I, 1977, THERMOCHEMICAL PRO S
[2]   INFRA-RED SPECTRUM OF MONOCALCIUM PHOSPHATE MONOHYDRATE [J].
BERRY, EE .
SPECTROCHIMICA ACTA PART A-MOLECULAR SPECTROSCOPY, 1968, A 24 (11) :1727-&
[3]   SYSTEMATICS OF EVAPORATION COEFFICIENT AL2O3 GA2O3 IN2O3 [J].
BURNS, RP .
JOURNAL OF CHEMICAL PHYSICS, 1966, 44 (09) :3307-+
[4]   SPECTRA OF PHOSPHORUS COMPOUNDS .1. THE INFRA-RED SPECTRA OF ORTHOPHOSPHATES [J].
CHAPMAN, AC ;
THIRLWELL, LE .
SPECTROCHIMICA ACTA, 1964, 20 (06) :937-947
[5]   INFRARED SPECTRA OF PHOSPHORUS COMPOUNDS [J].
DAASCH, LW ;
SMITH, DC .
ANALYTICAL CHEMISTRY, 1951, 23 (06) :853-868
[6]   GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON [J].
DEAL, BE ;
GROVE, AS .
JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) :3770-&
[7]   KINETICS OF THERMAL GROWTH OF ULTRA-THIN LAYERS OF SIO2 ON SILICON .2. THEORY [J].
GHEZ, R ;
VANDERME.YJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (08) :1100-+
[8]   INVESTIGATION OF THERMALLY OXIDISED SILICON SURFACES USING METAL-OXIDE-SEMICONDUCTOR STRUCTURES [J].
GROVE, AS ;
DEAL, BE ;
SNOW, EH ;
SAH, CT .
SOLID-STATE ELECTRONICS, 1965, 8 (02) :145-+
[9]  
HINCHCLIFFE AJ, 1973, J PHYS CHEM, V77, P2573
[10]  
KUBASCHEWSKI O, 1967, METALLURGICAL THERMO, P415