THERMAL-OXIDATION OF INP AND PROPERTIES OF OXIDE FILM

被引：64

作者：

YAMAGUCHI, M

ANDO, K

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 09期

关键词：

D O I：

10.1063/1.328380

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5007 / 5012

页数：6

共 22 条

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